JPS6418727U - - Google Patents
Info
- Publication number
- JPS6418727U JPS6418727U JP11444187U JP11444187U JPS6418727U JP S6418727 U JPS6418727 U JP S6418727U JP 11444187 U JP11444187 U JP 11444187U JP 11444187 U JP11444187 U JP 11444187U JP S6418727 U JPS6418727 U JP S6418727U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- sample
- extraction window
- supply pipe
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444187U JPS6418727U (en]) | 1987-07-24 | 1987-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444187U JPS6418727U (en]) | 1987-07-24 | 1987-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418727U true JPS6418727U (en]) | 1989-01-30 |
Family
ID=31355194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11444187U Pending JPS6418727U (en]) | 1987-07-24 | 1987-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418727U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200030110A (ko) * | 2017-08-10 | 2020-03-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 탄소 화합물들의 증착 또는 처리를 위한 마이크로파 반응기 |
-
1987
- 1987-07-24 JP JP11444187U patent/JPS6418727U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200030110A (ko) * | 2017-08-10 | 2020-03-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 탄소 화합물들의 증착 또는 처리를 위한 마이크로파 반응기 |
| CN111066120A (zh) * | 2017-08-10 | 2020-04-24 | 应用材料公司 | 用于沉积或处理碳化合物的微波反应器 |
| JP2020530660A (ja) * | 2017-08-10 | 2020-10-22 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 炭素化合物の堆積及び処理のためのマイクロ波リアクタ |